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Development of a Time-efficient Simulation Algorithm for MEMS Electrostatic Actuators
The proposed master thesis work consists of developing a time-efficient numerical algorithm for simulating special electrostatic thin-film actuators which have been developed at the microsystem technology group at KTH. Electrostatic actuators typically consist of a moving electrode and a fixed electrode with an initial gap of a few micrometers between the electrodes, and the moving structure is pulled toward the fixed structure when a voltage is applied between the two electrodes. Such actuators are typically used for RF MEMS (radio-frequency microelectromechanical systems) switches, gas valves, etc. At KTH, a special variant of such an actuator has been developed and characterized, and currently, suitable simulation tools are missing to predict the static and dynamic behavior of the actuator. Previous work on an algorithm for a simplified geometry is already available and can be used as a base for the thesis work. The candidate has to understand the problem, develop a suitable mathematical description, and implement a time-efficient algorithm in a programming language, preferred MATLAB script. The goal of the thesis work is to develop the simulation tool, to compare its performance with existing experimental evaluation data and to write a report and a scientific publication on the work.
- interest in numerical simulation and algorithm
- interest in describing physical problems with mathematical models
- experience with programming languages
- basic knowledge of MATLAB
- basic knowledge of mechanics and physics
- about 6 months or up to discussion
Possible begin of the work:
- as soon as possible or up to discussion
School of Electrical Engineering (Dept. of Signals, Sensors and Systems)
Royal Institute of Technology (KTH)
Informationen om uppsatsförslag är hämtad från Nationella Exjobb-poolen.